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Surface topography of laser annealed silicon

Contributors:   D. Haneman and Robert J. Nemanich
ABSTRACT
The topography of silicon has been studied by Nomarski and scanning electron microscopy and by light diffraction techniques. In addition to the previously known ripple structure with wavelength perpendicular to the laser E vector, two new ripple structures of other orientations have been found. The heights of the structures have been determined for the first time.

Publisher: Solid State Communications,   Volume: 43,   203-206 ||  Published: ||   Read more...