Contributors: J. Mort, D. Kuhman, M. Machonkin, M. Morgan, F. Jansen, K. Okumura, Y.M. LeGrice, and Robert J. Nemanich
ABSTRACT
The electrical conductivity of diamond thin films produced by the hot‐filament technique is found to increase when diborane is incorporated in the precursor gas mixture. The combination of well‐defined bulk conductivity measurements with quantitative secondary‐ion mass spectrometry and Raman spectroscopy shows that the conductivity increase is associated with atomic boron doping and rules out any significant role for a graphitic‐type component.